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High Precision Silicon Resonant Pressure Sensor
1. Full-temp full-range comprehensive accuracy: ±0.01%F.S
2. Frequency signal output
3. Max temperature range: -55℃~85℃
4. Optional electrical & pressure interfacesAdd to Inquiry
WebApr 20, 2018 · This chapter begins with the introduction of the working principle of the resonant pressure sensors, illustrating key relationships between (1) intrinsic resonant...
WebMar 28, 2020 · This paper proposes a MEMS resonant pressure sensor through implementing an out-of-plane repulsive (levitation) force to enhance the sensor detection...
WebAug 25, 2023 · A quartz resonant pressure sensor is proposed for high-precision measurement of ultra-high pressure. The resonant unit realizes a push–pull...
WebNov 16, 2020 · Abstract. In this paper, a novel resonant pressure sensor is developed based on electrostatic excitation and piezoresistive detection. The measured pressure applied to the diaphragm...
WebJan 26, 2016 · The resonant pressure sensor, which is one of the typical microelectromechanical systems (MEMS) devices, has been successfully applied in aerospace, industry control, and instrument...
WebOct 15, 2016 · A resonant pressure sensor with a quartz double ended tuning fork as a resonator bonded onto a silicon diaphragm was fabricated and tested [14]. The...







