Highly Integrated Silicon Resonant Pressure Sensor

The SG-P5 Highly Integrated Silicon Resonant Pressure Sensor adopts a MEMS micro-machined resonant structure as its sensing core and integrates an application-specific integrated circuit (ASIC) to realize the closed-loop control function of the circuit. When external pressure is applied to the silicon diaphragm, it generates mechanical stress that slightly changes the stiffness of the resonant beam, which directly translates into measurable changes in resonant frequency. Through the closed-loop frequency detection circuit, the frequency variation is precisely converted into pressure output.

Compared with traditional resistive/analog pressure sensors, the SG-P5's frequency-based sensing offers significant advantages: the digital frequency output is inherently resistant to electromagnetic interference and signal attenuation, ensuring excellent long-term stability and repeatability. Fabricated using deep reactive ion etching (DRIE) to achieve sub-micron structural precision, the sensor's resonant beam and differential dual-structure design effectively reduce temperature drift; combined with digital calibration algorithms, it performs reliably in long-duration and high-stability applications. Additionally, its high bandwidth response enables the capture of high-speed pressure fluctuations, making it suitable for static measurement as well as dynamic and real-time monitoring scenarios.

The MEMS + ASIC integrated product solution not only reduces the product size but also helps control costs, giving the SG-P5 obvious form advantages compared with other similar products. With its outstanding precision and robustness, it is an ideal choice for a wide range of applications including aerospace, oil & gas extraction, industrial automation, chemical process control, medical instrumentation, low-cost missiles, swarming drones, and eVTOL.

● Resonant frequency sensing enables high accuracy (full temperature and full range comprehensive accuracy up to ±0.01%F.S.) and excellent stability

● Frequency signal output (digital output type) with strong EMI resistance, suitable for harsh environment operation

● Differential resonant beam design ensures low temperature drift and long-term reliability, with the widest operating temperature range up to -55℃~85℃

● High-frequency dynamic response, capable of real-time process monitoring

● Miniaturized structure with high integrability, ideal for OEM and embedded devices

● Multiple electrical interfaces and pressure interfaces optional, adaptable to diverse application requirements

Aerospace & Aviation: turbine control, cabin pressure regulation, simulation/testing.

Oil & Gas / Petrochemical: wellhead pressure, fracturing pipelines, real-time field monitoring.

Chemical, Pharmaceutical & Industrial Processing: reactor control, leak monitoring, inline system measurement.

Industrial Automation & Control: gas/liquid pressure monitoring, flow and differential pressure control.

Medical & Life Science Instruments: precision micro-flow pressure measurement, gas system monitoring.

Marine & Deep-Sea Engineering: submersible pressure sensing (custom high-pressure packaging available).

Why Choose Our High-Performance Pressure Sensor?

• Strict quality control from raw silicon processing to DRIE micromachining and final calibration.
• Strong OEM customization capability - pressure ranges, packaging, signal output, interface selectable.
• Fast lead time & scalable delivery from prototype samples to full-scale production.
• Comprehensive engineering support, integration assistance & lifetime technical service.
• Industry recognition and ongoing R&D, ensuring product reliability and long-term technology evolution.

FAQ

Q1. What pressure ranges are available for SG-P5?

Ranges are customizable. Provide your target medium, range, temperature and integration requirements for configuration recommendations.

Q2. How stable is the long-term drift performance?

The resonant silicon structure combined with frequency measurement ensures ultra-low drift and high repeatability in continuous operation.

Q3. What output format does the sensor provide?

Digital frequency output. Signal interface/connector can be customized for OEM integration.

Q4. Can the sensor operate in high-temperature or EMI-rich environments?

Yes - the digital frequency-based mechanism offers strong electromagnetic immunity. High-temperature or corrosive environments may require customized protective packaging.

Q5. Do you support OEM or mass production orders?

Yes. We supply engineering samples, trial runs and mass production with certification, QC reporting and calibration data.

Hot Tags: Highly Integrated Silicon Resonant Pressure Sensor, China Highly Integrated Silicon Resonant Pressure Sensor manufacturers, suppliers, factory, high precision silicon vibration static pressure sensor, soi pressure sensor, resonant pressure sensor, Single channel Digital Output Pressure Sensor, SG P40 high precision silicon vibration static pressure sensor, High precision MEMS pressure sensor