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High Precision Silicon Resonant Pressure Sensor

High Precision Silicon Resonant Pressure Sensor

1. Full-temp full-range comprehensive accuracy: ±0.01%F.S
2. Frequency signal output
3. Max temperature range: -55℃~85℃
4. Optional electrical & pressure interfaces
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Product Details

Products Description

 

The SG-P1 Series High Precision Silicon Resonant Pressure Sensor is the flagship product developed by Sangastech, based on advanced Micro-Electro-Mechanical Systems (MEMS) technology and the superior mechanical properties of monocrystalline silicon. It employs an energy exchange mechanism that directly converts the stress caused by pressure into the natural resonant frequency of the mechanical component, fundamentally ensuring extremely high measurement accuracy and long-term stability.

Core Technical Advantages:

1,In-Situ Temperature Self-Compensation Technology: Innovatively uses a dual-resonator structure design. When ambient temperature changes, the frequency variations in the two resonators trend oppositely. Real-time compensation via a digital algorithm effectively eliminates the challenging temperature drift of traditional sensors, achieving a composite accuracy of 0.01% F.S. across the full temperature range.

2,Full-Temperature Range Closed-Loop Amplitude Stabilization Control: Effectively suppresses the non-linear error of the resonant frequency, ensuring the sensor maintains high-accuracy output across its entire operating temperature range.

3,Wafer-Level Vacuum Packaging: The core chip is sealed in a high-grade vacuum, minimizing the impact of ambient gases on the resonator's Quality Factor (Q-value), thus guaranteeing high resolution and outstanding time stability (suppressing zero-point drift).

4,Frequency Digital Output: The sensor directly outputs a frequency signal, avoiding A/D conversion errors and noise interference within the signal chain, achieving pure digital-level accuracy that is easy to integrate and suitable for remote transmission.

The design philosophy of the SG-P1 Series is to provide a scientifically reliable pressure measurement solution for industries with extreme demands for accuracy, long-term stability, and environmental adaptability.

 

FEATURES

 

The SG-P1 Series is not just a sensor; it is the foundation of precision for your critical measurement links.

  • Ultimate Accuracy:The comprehensive accuracy of full temperature and full range can reach ±0.01%F.S.making it the first choice for high-precision calibration and data acquisition.
  • High Reliability: Made from monocrystalline silicon, offering excellent elasticity modulus and anti-fatigue characteristics, resisting high-frequency vibration and shock.
  • Superior Anti-Interference: The frequency output is inherently a digital signal, greatly enhancing the signal's Electro-Magnetic Interference (EMI) immunity, suitable for complex electromagnetic environments.
  • Temperature Drift Elimination: Unique dual-resonator in-situ self-compensation mechanism, achieving truly high-accuracy operation across a wide temperature range.
  • Extended Lifespan: No fragile mechanical moving parts, combined with vacuum packaging technology, providing exceptionally high long-term stability and reliability.
  • Low Power Consumption Design: Compared to traditional capacitive/piezoresistive sensors, silicon resonant technology features lower energy consumption, suitable for battery-powered or power-sensitive applications.
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SPECIFICATIONS

 

Pressure range

140kPa

Choose arbitrarily in 0 to optional pressure range with calibration range, minimum calibration pressure 5kPa

280kPa

350kPa

1MPa

2MPa

Type of pressure

Absolute pressure

Measuring medium

Dry, non-corrosive gas (silicon wafer bare structure)

Gas or liquid adapt with stainless steel 316L (oil-filled isolation structure)

Breaking pressure

140kPa:3.5×F.S.

Overload pressure

140kPa:3.0×F.S.

280kPa:2.0×F.S.

280kPa:1.5×F.S.

350kPa:1.5×F.S.

350kPa:1.2×F.S.

1MPa:2.0×F.S.

1MPa:1.5×F.S.

2MPa:2.0×F.S.

2MPa:1.5×F.S.

Supply voltage

15V±0.5V DC

Current consumption

≤30mA

Optional combined accuracy

±0.01%F.S.

Long-term stability

Raised stage±0.01%F.S.

±0.02%F.S.

Standard grade±0.02%F.S.

Response time

Pressure changes from10%F.S. to 90%F.S.<25ms

Acceleration effects

Pressure changes from10%F.S. to 90%F.S.<25ms

Starting time

250ms reach the accuracy index after power supply

Output range

Pressure frequency:30kHz~50kHz

Temperature frequency:2kHz~15kHz

Temperature to ground voltage:200mV~1800mV

Temperature differential voltage:0~1500mV

Output Method

Pressure frequency

Temperature frequency

Temperature voltage

Compensation temperature range

-10~50℃

-40~80℃

-55~85℃

-55~100℃

 

OVERALL DIMENSION

 

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Sintered lead column M10×1 external thread M10×1external thread (80 degree inner cone)

 

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M12×1 external thread M12×1external thread (60 degree inner cone)

 

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PU cable Sensor structure

Applications

 

With its top-tier accuracy and reliability, the SG-P1 Series is the ideal choice for the following demanding application fields.

Primary Application Industries

  • Aerospace and Defense: Airborne air data computers, backup instrumentation systems, flight parameter (altitude, airspeed) measurement.
  • Industrial Calibration and Metrology: Digital pressure gauges, pressure controllers, high-precision pressure calibrators, standard pressure generators.
  • Precision Manufacturing and Control: Cleanroom pressure monitoring, semiconductor equipment process control, high-precision fluid control systems.
  • Scientific Research and Meteorology: High-precision meteorological stations, high-accuracy environmental parameter acquisition.
  • High-Altitude Flight Data Measurement: Real-time, precise measurement of barometric and dynamic pressure to provide reliable data for flight control.
  • Production Line Precision Pressure Calibration: Serving as a secondary standard or reference pressure source in the production process for online calibration of other sensors.
  • Vacuum and Ultra-Clean Environment Monitoring: Precisely monitoring subtle pressure changes in reaction chambers, cleanrooms, or glove boxes to ensure stable process environments.

 

Why Choose Our SG-P1 Series High Precision Silicon Resonant Pressure Sensor?

Choosing Sangastech means you select reliable technology, trusted quality, and a flexible partnership.

1. Credibility of Core Technology

Technical Depth: We have focused on the R&D of silicon resonant sensors for years, holding core patent technology, including the dual-resonator temperature self-compensation and wafer-level vacuum packaging technologies.

Scientific Foundation: The silicon resonant principle converts pressure into frequency, a physical quantity whose measurement is inherently digital, avoiding the drawbacks of analog signals susceptible to interference. Performance is traceable and verifiable.

2. Rigorous Quality Control System

Raw Material Screening: We only use ultra-stable monocrystalline silicon wafers as core material, ensuring product consistency from the source.

Full-Process Testing: Every SG-P1 sensor undergoes strict calibration and testing across the full temperature range and full pressure span, and is supplied with a detailed test report.

3. Flexible Customization and Quick Response

Customization Capability: Beyond standard configurations, we offer flexible customization services for ranges, interfaces (electrical/pressure), and signal output formats (frequency/digital protocol) to perfectly match your system integration needs.

Professional Technical Support: Our engineering team possesses deep sensor application expertise and can provide comprehensive technical support, including application consultation, integration guidance, and troubleshooting.

Efficient Delivery: Thanks to optimized supply chains and production processes, we are committed to providing industry-leading delivery cycles, ensuring your project timelines are met.

FAQ

Q1: Is the ±0.01% F.S. accuracy of the SG-P1 Series a "Composite Accuracy Across the Full Temperature Range"?

A: Yes, it is. ±0.01% F.S. represents the composite metric of sensor accuracy (including non-linearity, hysteresis, and temperature error) across the entire operating temperature range (-55℃--+85℃) and the full pressure span. This is achieved thanks to our unique dual-resonator in-situ temperature self-compensation technology.

Q2: What are the main advantages of silicon resonant sensors compared to traditional piezoresistive or capacitive sensors?

A: The main advantages lie in stability and accuracy. Silicon resonant technology converts pressure into frequency, a signal less susceptible to temperature and electromagnetic interference, offering inherently high resolution and high stability. Long-term drift (Time Drift) and temperature drift are significantly lower than traditional sensors.

Q3: How can I integrate the SG-P1's frequency output into my system?

A: The frequency signal can be accurately acquired directly using a counter. We can also provide SG-P series transmitters with standard digital interfaces (such as RS-485/RS-232/CAN, etc.), allowing for direct integration via digital protocol.

Q4: How does your company ensure the long-term stability of the product?

A: We ensure stability through three aspects:

Material: Utilizing highly stable monocrystalline silicon.

Process: The core chip uses wafer-level vacuum packaging to effectively isolate the environment.

Design: Unique stress-relief structures and closed-loop control technology ensure long-term performance both physically and electrically.

Q5: Can you customize the pressure interface and electrical interface for specific applications?

A: Absolutely. We understand that B2B customers require both standardization and customization. Please provide your detailed specifications (e.g., interface type, size, mounting method, output protocol, etc.), and our customization team will provide you with the optimal solution.

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