High Precision Silicon Resonant Pressure Sensor

Silicon resonant pressure sensors represent the highest-precision pressure sensors currently available, boasting advantages such as high precision, excellent stability, and quasi-digital output - making them widely applicable in aviation atmospheric data measurement systems, pressure controllers, and meteorological measurement equipment. The SG-P2 series high-precision silicon resonant pressure sensor leverages advanced silicon resonant MEMS technology, integrating a single-crystal silicon micro-mechanical resonant beam with a pressure-sensitive diaphragm, while adopting a simplified pressure and electrical interface design; under the premise of ensuring performance, its size is minimized to facilitate product disassembly and installation.

The core resonant structure of the SG-P2 series employs a tuning fork beam design operating in in-plane vibration mode. The interaction between electrical signals and mechanical vibration is achieved through electrostatic excitation and capacitive vibration pickup, with a closed-loop control circuit converting frequency signals into output. Specifically, pressure-induced stress alters the stiffness of the resonant beam, leading to a measurable shift in its natural resonant frequency; this shift is detected via a vacuum-packaged cavity and a high-stability frequency detection circuit, which converts it into precise pressure readings. Compared to traditional piezoresistive or capacitive sensors, this frequency-based working principle inherently provides digital frequency output, extremely high interference immunity, and long-term stability.

Through precise microfabrication processes - including Deep Reactive Ion Etching, high-accuracy silicon-silicon bonding, and vacuum packaging - the SG-P2 series ensures structural consistency and minimal manufacturing errors (±0.1 µm), delivering excellent frequency accuracy and repeatability. Additionally, its differential dual-resonator structure combined with temperature compensation effectively reduces temperature-induced frequency drift, maintaining high precision across a wide temperature range.

Since the output is frequency-based (digital) rather than analog voltage/current, the signal is naturally immune to electromagnetic interference (EMI), power fluctuations, and analog noise, making the SG-P2 series ideal for industrial control systems (PLC/DCS/SCADA), remote monitoring/data acquisition (DAQ), and automated process control. Its modular packaging design also allows customers to customize pressure ranges, process connections, and output interfaces for seamless system integration.

• Digital Frequency Output - Immune to EMI, power fluctuations, and noise; facilitates digital signal processing and remote monitoring.
• High Precision & Stability - Single-crystal silicon resonator + micro-machining + vacuum packaging + temperature ,The comprehensive accuracy of full temperature and full range can reach ±0.01%F.S.Compensation ensures high accuracy and long-term reliability.
• Wide Pressure Range & High Pressure Capability - Supports low to high-pressure applications, suitable for complex industrial environments.
• Temperature Compensation / Stability - Differential dual-resonator design reduces temperature-induced frequency drift.
• Modular & Customizable - Supports customization for pressure range, process connections, output interfaces, and materials.
• Long-Term Reliability & Low Maintenance - Vacuum packaging and stable resonator structure reduce calibration frequency and maintenance costs.
• Easy System Integration - Digital output compatible with PLC/DCS/DAQ/SCADA/IoT systems, ideal for automation, remote monitoring, and data acquisition.

SG‑P2 series sensors are ideal for industries and scenarios requiring high precision, stability, and reliability:

• Oil & Gas - High-pressure pipelines, compression stations, injection systems, downhole pressure monitoring.
• Petrochemical / Chemical - High-pressure reactors, chemical process monitoring, high-precision pressure control systems.
• Industrial Automation & Process Control - Gas/liquid pressure monitoring, industrial process automation, PLC/DCS integration.
• Aerospace / Engine Testing - Gas/air pressure systems, combustion chamber and pneumatic system monitoring.
• Marine / Deep-Sea - High-pressure seawater/oil well pressure measurement with proper packaging and anti-corrosion design.
• Energy / Power - Boilers, steam systems, compressed air, high-pressure gas systems.
• Instrumentation / Research - Scientific instruments and test equipment requiring high precision, repeatability, and long-term stability.

(Customizable packaging/process connection to adapt to more industrial/research scenarios.)

Why Choose Our High-Precision Silicon Resonant Pressure Sensor?

Strict Quality Control & Precision Manufacturing - Advanced MEMS fabrication (DRIE + single-crystal silicon + vacuum packaging + temperature-compensated structure) ensures consistency and high reliability.

Strong Customization Capability - Tailor pressure range, process connection, output interface, and packaging/materials to meet integration needs with PLC/DCS/SCADA/DAQ systems.

Fast Delivery / Batch Supply - Mature processes and supply chain support medium to large-scale orders with industrial project timelines.

Long-Term Stability Reduces Maintenance Costs - Resonant frequency output + vacuum packaging + temperature compensation structure ensures minimal drift and high repeatability.

Technical Support & System Integration Service - One-stop service from product selection, customization, installation, and calibration to after-sales support. Assistance with system integration and verification ensures reliable, safe, and user-friendly operation.

FAQ

Q1: Why choose frequency output instead of traditional analog (4‑20 mA / 0–5 V)?

A1: Frequency output is inherently digital and immune to EMI, power fluctuations, and signal line noise. It is also easier to process digitally and transmit remotely, offering higher stability and reliability than analog output.

Q2: How does temperature affect measurement accuracy, and how is thermal drift compensated?

A2: The differential dual-resonator design ensures both resonators respond equally to temperature but oppositely to pressure. Differential frequency output effectively compensates for thermal drift, maintaining high accuracy over wide temperature ranges.

Q3: Can the SG‑P2 series handle high pressure?

A3: Yes. The resonator beam + micro-cavity + reinforced structure design allows high-pressure applications (up to ~100 MPa in similar structures), while maintaining high accuracy and stability. Packaging and materials can be customized for high-pressure systems.

Q4: Is the output interface flexible for integration with PLC/DCS/SCADA?

A4: Yes. Modular design supports customizable output (digital frequency, industrial standard signals, special protocols) and can be adapted for signal compatibility with existing control systems.

Q5: What is the delivery time and batch supply capability?

A5: Our mature production process supports medium to large-scale orders. Standard products have short lead times; for custom requirements, we provide a clear production and delivery schedule, ensuring quality and reliability.

If you are interested in the SG‑P2 Series High Precision Silicon Resonant Pressure Sensor, whether standard or customized for your process (pressure range / interface / packaging / environment), please contact us for a datasheet, calibration certificate, sample testing, or bulk quotation. We provide professional technical support, reliable delivery, and excellent after-sales service.

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