The SG-H22 series pressure chips are silicon piezoresistive pressure-sensitive chips based on SOI technology, capable of withstanding high temperatures up to 300℃. This series of chips utilizes the piezoresistive detection principle. When the pressure-sensitive diaphragm deforms under pressure, the resistance change on the sensitive diaphragm characterizes the magnitude of the input pressure. Under constant voltage/constant current source excitation, the generated output voltage has a linear relationship with the input pressure.

The SG-H22 series chips feature high stability, high repeatability, and a wide operating temperature range. They are suitable for various packaging forms and can provide absolute pressure (A) or gauge pressure (G) chips according to different application environments, being applicable to digital compensation and resistance network compensation.

Features

Application

High repeatability
High reliability
Wide temperature range: -55℃ ~ 300℃

Meteorological measurement
Atmospheric Data System
Oil drilling
Industrial measurement and control

product-916-318

Performance specifications

Standard range
10M0	0 ~ 10Mpa	G/A	1500psi
20M0	0 ~ 20Mpa	G/A	3000psi
28M0	0~28Mpa	G/A	4000psi
45M0	0 ~ 45Mpa	G/A	6500psi
70M0	0 ~ 70Mpa	G/A	10000psi
Overload pressure	2 times		Rated pressure

Performance parameter

Parameter	Min	Typical	Max	Unit	Mark
Repeatability	0.01	0.03	0.05	±%FSO	2
Linearity	0.01	0.15	0.2	±%FSO	1
Hysteresis	0.01	0.03	0.05	±%FSO	2
Zero temperature hysteresis	0.01	0.1	0.2	±%FSO	2 3
Sensitivity temperature hysteresis	0.01	0.1	0.2	±%FSO	2 3
Full range span	80	100	120	mV	2 3
Zero temperature coefficient TCO	-500	-100	500	ppm/℃	2
Sensitivity temperature coefficient TCS	-1200	-950	-800	ppm/℃
Bridge resistance temperature coefficient TCR	1400	1600	1800	ppm/℃	2

Characteristic parameter

Excitation	Unit
2~10	V
0.2~2	mA

Bridge resistance	2kΩ ～ 5kΩ
Work temperature	-55℃ ~ 300℃
Weight	0.03~0.05g
Bridge form	Half open bridge
Suitable medium	Clean, dry, and free of corrosive gases

Dimension

Pressure range	Overall dimension
10Mpa~70Mpa	2.5×2.5×2.4

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