 |
SG-P1
SANGAS
Silicon resonant pressure sensor is the highest precision pressure sensor at present. Because of its high precision, good stability, quasi-digital output and other advantages, which can be widely used in aviation atmospheric data measurement system, pressure controller and meteorological measurement equipment.
The resonant structure of the sensor core adopts the tuning fork beam design, and its working mode is in-plane vibration. The interaction between electrical signal and mechanical vibration is realized through electrostatic excitation and capacitive vibration pickup, and then the frequency signal is converted into the output the closed-loop control circuit.
SG-P1 series high precision silicon resonant pressure sensor adopts simple pressure interface and electrical interface, under the condition of ensuring performance, the size of the sensor is compressed to the minimum which is convenient for product disassembly and installation.
● The comprehensive accuracy of full temperature and full range can reach ±0.01%F.S.
● Frequency signal output
● The widest temperature range can reach-55℃~85℃
● Variety of electrical interface and pressure interface are optional
Pressure range | 140kPa | Customers can choose any calibration range from 0 to optional, with a minimum calibration pressure of 5K pa | |
280kPa | |||
350kPa | |||
1MPa | |||
2MPa | |||
Type of pressure | Absolute pressure | ||
Measuring medium | Dry, non-corrosive gas (Silicon wafer bare structure ) Gas or liquid adapted to stainless steel 316L(oil-filled isolation structure) | ||
Breaking pressure | 140kPa:3.5×F.S. | Overload pressure | 140kPa:3.0×F.S. |
280kPa:2.0×F.S. | 280kPa:1.5×F.S. | ||
350kPa:1.5×F.S. | 350kPa:1.2×F.S. | ||
1MPa:2.0×F.S. | 1MPa:1.5×F.S. | ||
2MPa:2.0×F.S. | 2MPa:1.5×F.S. | ||
Supply voltage | 15V±0.5DC | Current consumption | ≤30mA |
Optional comprehensive accuracy | ±0.01%F.S. | Long-term stability | Upgrade ±0.01%F.S. |
±0.02%F.S. | Standard grade±0.02%F.S. | ||
Response time | ＜25ms(Pressure changes from10%F.S. to 90%F.S) | Acceleration effects | ＜25ms(Pressure changes from10%F.S. to 90%F.S) |
Starting time | Achieve accuracy indicators after 250ms when power supply | ||
Output method | Pressure frequency | Output range | Pressure frequency:30kHz~50kHz |
Temperature frequency | Temperature frequency:2kHz~15kHz | ||
Temperature voltage | Temperature to ground voltage:200mV~1800mV | ||
Temperature differential voltage:0~1500mV | |||
Compensation temperature range | -10℃～50℃ | ||
-40～80℃ | |||
-55℃～85℃ | |||
-55℃～100℃ | |||
Overall dimension:
Silicon resonant pressure sensor is the highest precision pressure sensor at present. Because of its high precision, good stability, quasi-digital output and other advantages, which can be widely used in aviation atmospheric data measurement system, pressure controller and meteorological measurement equipment.
The resonant structure of the sensor core adopts the tuning fork beam design, and its working mode is in-plane vibration. The interaction between electrical signal and mechanical vibration is realized through electrostatic excitation and capacitive vibration pickup, and then the frequency signal is converted into the output the closed-loop control circuit.
SG-P1 series high precision silicon resonant pressure sensor adopts simple pressure interface and electrical interface, under the condition of ensuring performance, the size of the sensor is compressed to the minimum which is convenient for product disassembly and installation.
● The comprehensive accuracy of full temperature and full range can reach ±0.01%F.S.
● Frequency signal output
● The widest temperature range can reach-55℃~85℃
● Variety of electrical interface and pressure interface are optional
Pressure range | 140kPa | Customers can choose any calibration range from 0 to optional, with a minimum calibration pressure of 5K pa | |
280kPa | |||
350kPa | |||
1MPa | |||
2MPa | |||
Type of pressure | Absolute pressure | ||
Measuring medium | Dry, non-corrosive gas (Silicon wafer bare structure ) Gas or liquid adapted to stainless steel 316L(oil-filled isolation structure) | ||
Breaking pressure | 140kPa:3.5×F.S. | Overload pressure | 140kPa:3.0×F.S. |
280kPa:2.0×F.S. | 280kPa:1.5×F.S. | ||
350kPa:1.5×F.S. | 350kPa:1.2×F.S. | ||
1MPa:2.0×F.S. | 1MPa:1.5×F.S. | ||
2MPa:2.0×F.S. | 2MPa:1.5×F.S. | ||
Supply voltage | 15V±0.5DC | Current consumption | ≤30mA |
Optional comprehensive accuracy | ±0.01%F.S. | Long-term stability | Upgrade ±0.01%F.S. |
±0.02%F.S. | Standard grade±0.02%F.S. | ||
Response time | ＜25ms(Pressure changes from10%F.S. to 90%F.S) | Acceleration effects | ＜25ms(Pressure changes from10%F.S. to 90%F.S) |
Starting time | Achieve accuracy indicators after 250ms when power supply | ||
Output method | Pressure frequency | Output range | Pressure frequency:30kHz~50kHz |
Temperature frequency | Temperature frequency:2kHz~15kHz | ||
Temperature voltage | Temperature to ground voltage:200mV~1800mV | ||
Temperature differential voltage:0~1500mV | |||
Compensation temperature range | -10℃～50℃ | ||
-40～80℃ | |||
-55℃～85℃ | |||
-55℃～100℃ | |||
Overall dimension:
