What factors can affect the measurement frequency of piezoresistive silicon resonant pressure sensors? I.Sensor - related Factors Structural Design: Resonator Structure: Support Structure: Electrode Arrangement: Material Properties: The Elastic Modulus of Silicon Material: Piezoresistive Coefficient: Temperature Coefficient: II. Environmental Factors Temperature: Humidity: Rate of Pressure Change: Electromagnetic Interference: III. Measurement Circuit Factors Excitation Signal Source: Signal Detection and Processing Circuit:
