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Resonant sensors are a type of quasi-digital sensors that utilize the measured physical quantity to change the resonant characteristics of the resonant sensitive structure and directly output frequency signals.
I.Sensor - related Factors Structural Design: Resonator Structure: Support Structure: Electrode Arrangement: Material Properties: The Elastic Modulus of Silicon Material: Piezoresistive Coefficient: Temperature Coefficient: II. Environmental Factors Temperature: Humidity: Rate of Pressure Change: Electromagnetic Interference: III. Measurement Circuit Factors Excitation Signal Source: Signal Detection and Processing Circuit:
